Plasma Etch MKII-OC

Plasma Etch MKII-OC
Plasma Etcher, 4 different type of gases have been used Hydrogen Oxygen Tetrafluor and Nitrogen, including Edwards Dry pump system vacuum pump IQ DP80, up to 6 panels, max. panel size: 450 x 630 mm, floor space: 3550 x 3550 mm, max. height: 2140 mm. serial no. 72203. Year 2003. Edwards Dry pump as NEW (Year 2015). Find a detailed description of the etcher in .pdf below.

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